The PICOStation™ system is an AFM/SPM stand-alone instrument achieving atomic

Tag : air tools & instrument
S.I.S. will be renamed Bruker Nano GmbH and will operate under itsprevious management. Starting today, Bruker’s new AFM productline will be exhibited at the 14th European Microscopy Congress(EMC 2008, September 1-5), also in Aachen, Germany.

Dr. Frank Burgaezy, Bruker AXS Executive Vice President, commented:“The new Bruker high-performance AFM products range fromsmall bench-top AFM systems, to integrated high-end AFM/opticalmicroscope combinations, all the way to large floor standinginstruments for the characterization of 300mm wafers in clean roomenvironments. The impressive S.I.S. core technology consists ofextremely compact AFM/SPM components which can be used easily withmany instruments such as optical microscopes or micro-hardnesstesters. We are very pleased to have S.I.S. join the Bruker group,and further enhance our extensive high-performance materialsresearch and QC product lines.”

“The most widely distributed S.I.S. product is theULTRAObjective™, an extremely compact AFM add-on unit whichcan be easily integrated with standard optical microscopes. Thisstraightforward integration provides direct access to thenanoworld, without compromise,” added S.I.S. ManagingDirector Dr. Frank Saurenbach.

The PICOStation™ system is an AFM/SPM stand-alone instrumentachieving atomic resolution. With optional upgrades, thefunctionality can be expanded to a full-fledged AFM/SPM researchtool. The options range from non-contact, MFM/EFM and forcespectroscopy modes to measurements of friction and adhesionproperties, all the way to resistance/work functioncharacterization. A liquid immersion system is also available.

Combined with the optics of a research-grade optical microscope,the NANOStation™ II is a high performance inspection system.This robust instrument provides resolution in the sub-nanometerrange and accepts various sample sizes. The easy handling of boththe optical inspection and the AFM tool makes the NANOStation II aworkhorse in every lab where accuracy, stability and reliabilityare of concern.

With the NANOStation™ HD, Bruker now provides an AFMinspection tool that provides resolution in the sub-Angstrom rangeand operates with under automation. Initially developed for theroutine characterization of defects on hard disks, the NANOStationHD has evolved to a widely used premium AFM in various industrialapplications. It allows preselecting multiple scanning locationswith the integrated optical microscope, and subsequently runningfully automatic AFM measurements. With its macro-programmingcapability, the user can even implement measurement cycles andmethods. The NANOStation HD can be equipped with R-Θ or X-Ystages and handles sample sizes up to 100mm.

The NANOStation™ 300 AFM/SPM tool is another highlight of thenew Bruker AFM product range. It combines the ability to inspectlarge samples with sizes up to 300 mm with a premium resolution ofbetter than 0.05 nm. The rock-solid platform consists of granitewith integrated air-bearing stages for fast positioning and highrepeatability. Targeting the semiconductor market, the NANOStation300 is clean room compatible and provides automated measurements.Coordinate files of various formats can be imported and used forfinding and identifying defects. The NANOStation 300 is made forwafer inspection, mask metrology, solar panel characterization, andother applications where large samples need to be inspected withhighest accuracy. Besides AFM, the NANOStation 300 can be equippedwith optical, confocal, Laser scanning, Raman microscopy or otherinspection tools.


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Posted September 3rd, 2008